Device for treating substrates in a fluid container
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United States of America Patent
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Nov 30, 1999
Issued Date -
N/A
app pub date -
Apr 7, 1998
filing date -
Apr 24, 1996
priority date (Note) -
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Abstract
A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.
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