Single-pole single-throw microelectro mechanical switch with active off-state control
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United States of America Patent
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Nov 30, 1999
Grant Date -
N/A
app pub date -
Aug 4, 1998
filing date -
Aug 4, 1998
priority date (Note) -
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Abstract
A microelectromechanical switch having a beam cantilevered from a switch base, a first control electrode, having no path to ground, in contact with the fixed end of the cantilevered beam and a second control electrode, also having no path to ground, mounted to the switch base underneath the cantilevered beam, but not in contact therewith. A contact electrode is located underneath the free end of the cantilevered beam. The first and second control electrodes are manipulated to actively effect both the ON and OFF states of the microelectromechanical switch by forcing the beam in and out of contact with the contact electrode.
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