Electrically programmable photolithography mask
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United States of America Patent
Stats
-
Dec 7, 1999
Grant Date -
N/A
app pub date -
Feb 27, 1997
filing date -
Feb 27, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electronically programmed mask is connected to an electronic device, such as a processor. In operation, a mask design is first entered into the processor. The processor controls a display of an image on the electronically programmed mask, wherein the display replicates conventional type masks. The electronically programmed mask is designed such that the display presented on its screen provides optical contrast and characteristics that are easily changed or reprogrammed by the processor. Electronically controlled masks provide the same patterns as mechanical type masks without requiring rigid, permanent type structures to form a desired pattern.
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