Metal to metal capacitor and method for producing same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6001702
SERIAL NO

09014934

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a method for fabricating a capacitor within a semiconductor device comprising the steps of forming openings in an oxide dielectric to reach a lower conductor layer which will serve as a lower conductor plate of the capacitor; depositing capacitor electrode material, such as tungsten to fill the openings to form a capacitor electrode and planarizing the filled openings using chemical/mechanical polish; depositing a selected oxide capacitor dielectric over the capacitor electrodes and patterning the capacitor dielectric with photoresist to leave dielectric covering the area of the capacitor electrodes; stripping away the photoresist; adding an upper conductor layer on top of the capacitor dielectric to serve as the top plate of the capacitor. The above steps may be repeated to form multiple layers of capacitors within the semiconductor device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
INTERNATIONAL BUSINESS MACHINES CORPORATIONARMONK, NY46918

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cook, Robert K Poughkeepsie, NY 8 139
Gruszecki, Craig R Hopewell Junction, NY 3 58
Passaro, Mark A Hopewell Junction, NY 2 35
Scholl, Frederick A Hopewell Junction, NY 3 40

Cited Art Landscape

Patent Info (Count) # Cites Year
 
GENERAL ELECTRIC COMPANY (1)
* 5736448 Fabrication method for thin film capacitors 97 1995
 
NANYA (1)
* 5478772 Method for forming a storage cell capacitor compatible with high dielectric constant materials 141 1995
 
TEXAS INSTRUMENTS INCORPORATED (1)
* 5622893 Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes 57 1994
 
NORTEL NETWORKS LIMITED (1)
* 5563762 Capacitor for an integrated circuit and method of formation thereof, and a method of adding on-chip capacitors to an integrated circuit 105 1994
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
ROUND ROCK RESEARCH, LLC (4)
7192827 Methods of forming capacitor structures 1 2001
* 2002/0090,777 Methods of forming capacitor structures, and capacitor structures 2 2001
* 7166883 Capacitor structures 1 2004
* 2005/0026,355 Capacitor structures 0 2004
 
KAO CORPORATION (1)
* 2003/0072,858 Oil composition 0 2002
 
U.S. PHILIPS CORPORATION (1)
* 6240621 Method of manufacturing a plurality of electronic components 79 1998
 
Ultrasource, Inc. (9)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
6890629 Integrated thin film capacitor/inductor/interconnect system and method 10 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6387775 Fabrication of MIM capacitor in copper damascene process 33 2001
6876027 Method of forming a metal-insulator-metal capacitor structure in a copper damascene process sequence 5 2003
 
MARVELL INTERNATIONAL LTD. (10)
6625006 Fringing capacitor structure 23 2001
6784050 Fringing capacitor structure 11 2003
6885543 Fringing capacitor structure 3 2003
6974744 Fringing capacitor structure 12 2004
6980414 Capacitor structure in a semiconductor device 22 2004
7116544 Capacitor structure in a semiconductor device 22 2005
7578858 Making capacitor structure in a semiconductor device 3 2006
7988744 Method of producing capacitor structure in a semiconductor device 2 2009
8537524 Capacitor structure in a semiconductor device 1 2011
9017427 Method of creating capacitor structure in a semiconductor device 0 2013
 
General Tool Company (1)
* 2003/0209,586 Friction stir welding machine and method 6 2003
* Cited By Examiner