Method of manufacturing a semiconductor device by using a homogenized rectangular laser beam
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 14, 1999
Issued Date -
N/A
app pub date -
Oct 23, 1997
filing date -
Jun 26, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of manufacturing a semiconductor device by emitting a laser beam from an excimer laser, modifying an energy distribution by passing the beam through a lateral flyeye lens followed by a vertical flyeye lens, condensing the laser beam in two perpendicular sections by two cylindrical lenses to give the beam a rectangular shape, where the longer side can be in excess of 10 cm, then scanning the beam with a single direction over a semiconductor device.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully