Structure and fabrication of electron-emitting device having ladder-like emitter electrode
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United States of America Patent
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Dec 14, 1999
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app pub date -
May 30, 1997
filing date -
May 30, 1997
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Abstract
An electron-emitting device utilizes an emitter electrode (12) shaped like a ladder in which a line of emitter openings (18) extend through the electrode. In fabricating the device, the emitter openings can be utilized to self-align certain edges, such as edges (38C) of a focusing system (37), to other edges, such as edges (28C) of control electrodes (28), to obtain desired lateral spacings. The self-alignment is typically achieved with the assistance of a backside photolithographic exposure operation. The ladder shape of the emitter electrode also facilitates the removal of short-circuit defects involving the electrode.
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