Laser illumination method

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United States of America Patent

PATENT NO 6002523
SERIAL NO

09163296

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Abstract

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A beam homogenizer at least includes a first optical lens for dividing a light beam into N(n'-1) beams in a vertical direction, a second optical lens for dividing the light beam into (2n+1) beams in a horizontal direction, a third optical lens for recombining the beams that are divided in the vertical and horizontal directions into (n'-1) beams while superimposing the (n'-1) beams so that they are deviated from each other in the horizontal direction, and a fourth optical lens for recombining the beams that are divided in the vertical direction.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR ENERGY LABORATORY CO LTD398 HASE ATSUGI-SHI KANAGAWA-KEN 243-0036

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Koichiro Kanagawa, JP 530 12050

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