Method of fabricating an electrostatic ultrasonic transducer
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United States of America Patent
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Dec 21, 1999
Issued Date -
N/A
app pub date -
Jan 31, 1997
filing date -
Oct 21, 1994
priority date (Note) -
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Abstract
A method of fabrication wherein a nitride layer is spaced from a conductive substrate by an insulating layer and etching removes at least portions of an insulating layer to leave a nitride membrane spaced from the substrate. The surface of the conductive layer where the insulating layer is removed is chemically roughened and the etchant is removed by freeze-drying and sublimation to eliminate sticking of the nitride layer to the substrate surface during fabrication.
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