Substrate processing apparatus
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United States of America Patent
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Dec 28, 1999
Grant Date -
N/A
app pub date -
Dec 23, 1996
filing date -
Dec 28, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A chemical supplied onto a substrate is contained in a chemical container. A chemical cooling unit keeps the chemical contained in the chemical container cooled to a proper temperature for storage. A chemical pressure-transferring portion causes the chemical to flow from the chemical container into a chemical introducing pipe. A chemical temperature controller portion changes the temperature of the chemical guided by the chemical introducing pipe to a proper temperature for application on a substrate. The chemical brought to the proper application temperature is guided to a chemical dispensing unit, which dispenses the chemical onto a substrate.
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