Method of fabricating a trench capacitor with a deposited isolation collar
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United States of America Patent
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-
Dec 28, 1999
Grant Date -
N/A
app pub date -
Apr 6, 1998
filing date -
Apr 6, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved trench capacitor is achieved by providing a node dielectric that lines the collar and sidewalls of the bottom of the trench. Further, the trench capacitor includes a lower portion having a diameter that is substantially the about same or greater than that of the upper portion.
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