Substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 11, 2000
Grant Date -
N/A
app pub date -
Apr 14, 1998
filing date -
Apr 21, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate processing apparatus which includes a substrate retention mechanism having retention rollers, including a plurality of driving rollers, for holding a substrate by abutting the retention rollers against different peripheral edge portions of the substrate, and a rotative driving mechanism for rotating the plurality of driving rollers. The plurality of driving rollers preferably include a pair of driving rollers generally opposed to each other diametrically of the substrate to be held. Further, the retention rollers preferably all serve as the driving rollers.
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