High sensitivity micro-machined pressure sensors and acoustic transducers
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United States of America Patent
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Jan 11, 2000
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N/A
app pub date -
Sep 17, 1997
filing date -
May 2, 1996
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Abstract
A method of making a pressure sensor or acoustic transducer having high sensitivity and reduced size. A thin sensing diaphragm is produced by growing a single crystal, highly doped silicon layer on a substrate using a chemical vapor deposition process. The diaphragm is incorporated into a pressure sensor or acoustic transducer which detects pressure variations by a change in the capacitance of a capacitor which includes the diaphragm as a movable member. The thin diaphragm produces a highly sensitive device which can be fabricated in a smaller size than sensors or transducers having thicker diaphragms.
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