Electron beam source for use with varying sizes of crucibles

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United States of America Patent

PATENT NO 6012413
SERIAL NO

09041055

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electron beam source provides beam focusing by placing magnets under the crucible. The location of the magnets, operating in conjunction with the remaining magnetic and electromagnetic structure, permits varying sizes of crucibles to be used without redesign of the remainder of the electron beam source.

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Patent Owner(s)

  • MDC VACUUM PRODUCTS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gao, Wei Fremont, CA 422 3538
Harris, Peter H San Francisco, CA 1 6
Tsujimoto, Nick Moraga, CA 3 14

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