Method of reforming a tip portion of a probe
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United States of America Patent
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Jan 11, 2000
Grant Date -
N/A
app pub date -
Mar 9, 1998
filing date -
Jul 24, 1997
priority date (Note) -
Expired
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Abstract
A method of reforming a tungsten probe tip includes forming a non-oxidizing metallic film on the surface of the tungsten probe tip, heating the film in a non-oxidizing atmosphere or vacuum, and diffusing the film into the tungsten probe tip. The non-oxidizing metallic film can be formed from a metal such as gold, platinum, rhodium, palladium, and iridium. The reformed tungsten probe tip can be used in low voltage and low current testing, and has excellent abrasion resistance, conductivity and oxidation resistance.
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