Wafer-mapping load post interface having an effector position sensing device
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United States of America Patent
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-
Jan 11, 2000
Grant Date -
N/A
app pub date -
Nov 25, 1998
filing date -
Nov 28, 1997
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A load port interface (20) receives, opens and closes a wafer carrier (22). A bulkhead (24) carries a changeable mating plate (92) that is pierced by a window (94). Changing the mating plate (92) adapts the load port interface (20) for use with different sizes of carriers(22). A table (32) of the load port interface (20) receives the carrier (22), advances the carrier (22) until it abuts and seals to the bulkhead (24). An end-effector (42), located on an opposite side of the bulkhead (24) from the carrier (22), actuates latch keys (54) to unlatch a door (48) from the carrier (22). The load port interface (20) then moves the unlatched door (48) rectilinearly, first horizontally away from the bulkhead (24) and then vertically downward, to expose semiconductor wafers (48) present within the carrier (22). The end-effector (42) includes sensors (86, 104) for collecting data about wafers (82) within the carrier (22) by detecting edges (118) thereof. This data is analyzed to determine the arrangement of wafers (82) within the carrier (22).
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