High speed inspection of a sample using coherence processing of scattered superbroad radiation
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United States of America Patent
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Jan 11, 2000
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N/A
app pub date -
Aug 21, 1997
filing date -
Aug 21, 1997
priority date (Note) -
Expired
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Abstract
Embodiments of the present invention are inspection methods and inspection apparatus for high speed, high precision inspection using parallel processing. In particular, an embodiment of a first aspect of the present invention is an inspection apparatus for inspecting a sample that uses parallel processing and which comprises: (a) a source of radiation which outputs superbroad inspection radiation having a frequency spectrum with an inspection width and reference radiation; (b) an inspection applicator apparatus which applies the inspection radiation as input to the sample; (c) an inspection collector apparatus which collects at least a portion of the inspection radiation that is scattered by the sample and applies at least a portion of the scattered inspection radiation as input to a dispersal apparatus; (d) wherein the dispersal apparatus applies radiation from the scattered inspection radiation as input to a plurality of coherence processors and applies radiation from the reference radiation as input to the plurality of coherence processors; and (e) a processor that fourier analyzes outputs from the coherence processors.
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