Coordinated X-Y stage apparatus
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United States of America Patent
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Jan 25, 2000
Issued Date -
N/A
app pub date -
Apr 28, 1999
filing date -
Mar 27, 1997
priority date (Note) -
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Abstract
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.
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