Microfabrication of cantilevers using sacrificial templates

United States of America Patent

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Jan 25, 2000
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N/A
app pub date
Feb 9, 1998
filing date
Feb 9, 1998

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Expired

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Abstract

A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.

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Patent Owner	Address
CALIFORNIA UNIVERSITY OF THE REGENTS OF THE	1111 FRANKLIN STREET 12TH FLOOR OAKLAND CA 94607

International Classification(s)

G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Chand, Ami	Goleta, CA	17	167
Hansma, Paul	Goleta, CA	6	144
Morrett, Hal J	Goleta, CA	1	62
Viani, Mario B	Santa Barbara, CA	4	77
Wendman, Mark A	Goleta, CA	3	80

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Microfabrication of cantilevers using sacrificial templates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09020816

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PATENT NO	6016693
SERIAL NO	09020816
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09020816

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