Microfabrication of cantilevers using sacrificial templates

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United States of America Patent

PATENT NO 6016693
SERIAL NO

09020816

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Abstract

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A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.

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Patent Owner(s)

  • REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chand, Ami Goleta, CA 17 165
Hansma, Paul Goleta, CA 6 139
Morrett, Hal J Goleta, CA 1 62
Viani, Mario B Santa Barbara, CA 4 77
Wendman, Mark A Goleta, CA 3 80

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