Monolithic ink jet printhead
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United States of America Patent
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-
Feb 8, 2000
Grant Date -
N/A
app pub date -
Aug 4, 1997
filing date -
Aug 4, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A method and structure are described for a monolithic roofshooter ink jet printhead which has nozzles and ink channels formed in a polyimide layer overlying a silicon substrate. Resistor heaters, addressing logic circuitry, and ink inlets are formed in a silicon substrate. A fabrication process, simple and monolithic, is performed at low temperatures resulting in a structure which has nozzle diameters of 30 .mu. separated by distances of 10 .mu. or less. This structure results in a printhead which has a printing resolution of 630 dpi.
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