Method for fabricating a MOSFET with raised STI isolation self-aligned to the gate stack

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United States of America Patent

PATENT NO 6022781
SERIAL NO

08772708

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Abstract

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A semiconductor structure comprising a transistor having a gate conductor that has first and second edges bounded by raised isolation structures (e.g. STI). A source diffusion is self-aligned to the third edge and a drain diffusion is self-aligned to the fourth edge of the gate electrode.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
El-Kareh, Badih Austin, TX 56 907
Ghatalia, Ashwin K Hopewell Junction, NY 3 180
Noble, Jr Wendell P Milton, VT 25 988

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