Apparatus and methods for heat loss pressure measurement
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United States of America Patent
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Feb 15, 2000
Grant Date -
N/A
app pub date -
Jul 21, 1997
filing date -
Jul 21, 1997
priority date (Note) -
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Abstract
An improved Pirani gauge has a small-diameter wire sensing element, coplanar with a small-diameter wire compensating element, with two parallel flat thermally conductive plates spaced from the sensing and compensating elements. The sensing and compensating elements and their connections have the same physical dimensions, thermal properties and resistance properties. The connections have large thermal conductances to a uniform temperature region and the elements are located in the same vacuum environment. A DC heating current is used and confined to only the sensing element. A relatively small AC signal is used to sense bridge balance. A simplified three-dimensional pressure compensation formula provides accurate compensation while simplifying the collection of calibration data. The improved gauge provides significant advancements in Pirani gauge accuracy, production cost, and package size.
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