Light modulating microdevice and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 15, 2000
Grant Date -
N/A
app pub date -
Nov 27, 1996
filing date -
Nov 27, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to spatial light modulators (SLM) for amplitude and phase modulation of incident light. A 'flexure' hinge which is provided between the SLM's substrate and micromirror comprises integral hinged sections which allow for the micromirror to tilt or to move in a piston-like fashion relative to the substrate in response to an electrostatic force. The hinge is particularly advantageous for large mirrors. In addition, the hinge can provide improved heat sinking capability over previously reported SLM hinge designs based on torsion bars and cantilever beams. The flexure hinge has sufficient mechanical flexibility that the SLM actuation voltage required is not excessively high. The flexure hinge has many applications, the preferred ones being a SLM for modulating high-energy beams and a SLM for optical channel switching.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully