Polishing pad conditioning surface having integral conditioning points
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United States of America Patent
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Feb 22, 2000
Grant Date -
N/A
app pub date -
Dec 3, 1997
filing date -
Dec 3, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A pad conditioner having integral conditioning points. The pad conditioner includes a conditioning surface having a first integral conditioning point extending from the conditioning surface. For one embodiment the conditioning surface is formed of diamond and an array of integral conditioning points including the first integral conditioning point extends from the diamond surface.
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