Semiconductor having low concentration of carbon

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6028264
SERIAL NO

08910465

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Abstract

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Non-single-crystalline semiconductor material or device containing carbon impurity in a concentration less than 4.times.10.sup.18 atoms/cm.sup.3.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamazaki, Shunpei Tokyo, JP 7534 239327

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