Semiconductor device evaluation system using optical fiber
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United States of America Patent
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Feb 22, 2000
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N/A
app pub date -
Mar 21, 1997
filing date -
Mar 22, 1996
priority date (Note) -
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Abstract
In a system for evaluating a semiconductor device, a laser beam generating unit generates a laser beam, and an optical fiber receives the laser beam to heat an area of the semiconductor device. A current deviation detector or a voltage deviation detector is connected to a terminal of the semiconductor device. As a result, the current deviation detector or the voltage deviation detector detects a current deviation or a voltage deviation at the terminal of the semiconductor device.
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