Method and apparatus for transfer of a reticle pattern onto a substrate by scanning

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United States of America Patent

PATENT NO 6031597
SERIAL NO

08950237

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Abstract

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A system and method for reproducing isolated images over an entire substrate, by creating multiple adjacent scanned strips of whole images using a unity magnification scanning photolithographic system.

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Patent Owner(s)

Patent OwnerAddress
KNIRCK JEFFREY GNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Knirck, Jeffrey G 868 Jasmine Dr., Sunnyvale, CA 94086 15 286
Swanson, Paul A 3585 Millet Ct., San Jose, CA 95014 9 197

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