US Patent No: 6,031,657
Number of patents in Portfolio can not be more than 2000
Membrane-actuated charge controlled mirror (CCM) projection display
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Feb 29, 2000
Issued date -
Dec 9, 1998
filing date -
09/208,041
serial no -
In Force
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Abstract
The present invention provides a Schlieren projection system with a large aperture reflective imager. The combination of a beam-addressed CCM design with flat-panel manufacturing techniques configuration produces a large aperture imager that overcomes the problems of limited deflection range, high beam current, electrostatic instability and limited resolution associated with known electrostatically-actuated micromirror targets. The CCM imager includes a thin insulating membrane that decouples the electron beam from the micromirror array. Decoupling also allows the mirror to be designed to optimize reflectivity, exhibit a higher resonant frequency for better video performance, and be fabricated simultaneously with the hinges. The CCM imager is fabricated using flat-panel manufacturing techniques that are ideally suited to producing large aperture devices at low cost.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 4,441,791 Deformable mirror light modulator | 589 | 1982 | |
| 4,680,579 Optical system for projection display using spatial light modulator device | 101 | 1983 | |
| 4,710,732 Spatial light modulator and method | 468 | 1984 | |
| 4,615,595 Frame addressed spatial light modulator | 377 | 1984 | |
| 4,956,619 Spatial light modulator | 553 | 1988 | |
| 5,083,857 Multi-level deformable mirror device | 514 | 1990 | |
| 5,142,405 Bistable DMD addressing circuit and method | 321 | 1990 | |
| 5,231,388 Color display system using spatial light modulators | 103 | 1991 | |
| 5,172,262 Spatial light modulator and method | 374 | 1992 | |
| 5,280,277 Field updated deformable mirror device | 310 | 1992 | |
| 5,452,024 DMD display system | 389 | 1993 | |
| 5,448,314 Method and apparatus for sequential color imaging | 392 | 1994 | |
| 5,444,566 Optimized electronic operation of digital micromirror devices | 345 | 1994 | |
| 5,650,881 Support post architecture for micromechanical devices | 250 | 1994 | |
| 5,612,753 Full-color projection display system using two light modulators | 77 | 1995 | |
| 5,504,614 Method for fabricating a DMD spatial light modulator with a hardened hinge | 105 | 1995 | |
| 5,579,151 Spatial light modulator | 68 | 1995 | |
| 5,567,334 Method for creating a digital micromirror device using an aluminum hard mask | 230 | 1995 | |
| 5,706,061 Spatial light image display system with synchronized and modulated light source | 142 | 1995 | |
| 5,535,047 Active yoke hidden hinge digital micromirror device | 438 | 1995 | |
| 5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer | 380 | 1995 | |
| 5,631,782 Support post architecture for micromechanical devices | 75 | 1995 | |
| 5,774,196 Method and apparatus of aligning color modulation data to color wheel filter segments | 68 | 1996 | |
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| 5,504,629 Optical projection system with a novel lens system | 24 | 1994 | |
| 5,486,881 Unique optical projection system | 24 | 1995 | |
| 5,636,070 Thin film actuated mirror array | 24 | 1995 | |
| 5,669,687 Optical projection system | 31 | 1996 | |
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| 4,744,636 Electron beam-addressed liquid crystal cell having coating layer for secondary electron emission | 17 | 1987 | |
| 4,765,717 Liquid crystal light valve with electrically switchable secondary electron collector electrode | 13 | 1987 | |
| 4,784,883 Liquid crystal cell and method of assembly of same | 12 | 1987 | |
| 4,884,874 Method of addressing display regions in an electron beam-addressed liquid crystal light valve | 15 | 1988 | |
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| 5,196,767 Spatial light modulator assembly | 30 | 1991 | |
| 5,287,215 Membrane light modulation systems | 167 | 1991 | |
| 5,471,341 Membrane light modulating systems | 156 | 1993 | |
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| 4,728,174 Electron beam addressed liquid crystal light valve | 25 | 1986 | |
| 4,826,293 Electron beam addressed liquid crystal light valve with input sheet conductor | 20 | 1987 | |
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| 4,229,732 Micromechanical display logic and array | 155 | 1978 | |
| 4,592,628 Mirror array light valve | 94 | 1981 | |
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| 5,689,278 Display control method | 10 | 1995 | |
| 5,610,478 Method of conditioning emitters of a field emission display | 11 | 1995 | |
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| 5,416,514 Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve | 58 | 1992 | |
| 5,508,738 Single panel color porjection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light | 62 | 1995 | |
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| 5,085,497 Method for fabricating mirror array for optical projection system | 77 | 1990 | |
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| 5,552,925 Electro-micro-mechanical shutters on transparent substrates | 217 | 1993 | |
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| 4,805,038 Imaging apparatus which includes a light-valve array having electrostatically deflectable elements | 53 | 1987 | |
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| 5,677,784 Array of pellicle optical gates | 46 | 1995 | |
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| 5,768,009 Light valve target comprising electrostatically-repelled micro-mirrors | 94 | 1997 | |
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| 4,387,964 Electron addressed liquid crystal light valve | 25 | 1980 | |
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| 4,786,149 Arrangement for optical image processing | 48 | 1987 | |
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| 4,698,602 Micromirror spatial light modulator | 89 | 1985 | |
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| 5,442,414 High contrast illumination system for video projector | 139 | 1994 | |
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| 5,447,110 Collapsible container | 32 | 1992 | |
| 5,493,439 Enhanced surface deformation light modulator | 100 | 1992 | |
| 5,557,177 Enhanced electron beam addressed storage target | 36 | 1994 | |
| 5,822,110 Reflective light valve modulator | 77 | 1997 | |