Infared emitter and methods for fabricating the same
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United States of America Patent
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Feb 29, 2000
Grant Date -
N/A
app pub date -
Jul 1, 1998
filing date -
Sep 8, 1995
priority date (Note) -
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Abstract
An infrared radiation source for sensor and spectroscopic use has a thin, electrically conducting film adapted to emit infrared radiation when heated. The film is formed from a gas or vapor phase and includes a network of diamond-like carbon. Depending on the percentage of metal atoms in the film, the film may have metal atoms which are either distributed in the diamond-like carbon network or else form an additional metallic network. The metal may be tungsten, chromium, or titanium, and the film may include silicon and oxygen.
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