Substrate transfer apparatus and heat treatment system using the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Feb 29, 2000
Grant Date -
N/A
app pub date -
Dec 8, 1997
filing date -
Jun 7, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate transfer apparatus (20) transfers a substrate between a first substrate support member (21) for supporting a plurality of substrates and a second substrate support member (15). This apparatus (20) includes a transfer apparatus main body (60) movable between a first transfer operation position where it can perform a substrate transfer operation with respect to the first substrate support member, and a second transfer operation position where it can perform a substrate transfer operation with respect to second substrate support member, a substrate receiving member (59b) arranged to be movable back and forth with respect to the transfer apparatus main body to support the substrate and to transfer the substrate to/from the first or second substrate support member, and non-contact sensors (70a, 70b) mounted on two side portions of the substrate receiving member (59b) and movable back and forth integrally with the substrate receiving member to detect a distance to the substrate and a position of the substrate in a horizontal plane.
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