Vacuum chuck
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 7, 2000
Grant Date -
N/A
app pub date -
Apr 16, 1998
filing date -
Apr 16, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum chuck having a body portion made of moldable glass or another suitable dielectric material including a top surface and bottom surface, a series of flat lands on the top surface of the body portion for supporting a wafer, and a series of orifices and vacuum lines for drawing a vacuum to secure the wafer in place on the lands of the body portion. A method of manufacturing such a vacuum chuck. A method of aligning a wafer on such a vacuum chuck.
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