Antireflective coating compositions
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United States of America Patent
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-
Mar 7, 2000
Issued Date -
N/A
app pub date -
Nov 7, 1997
filing date -
Jun 11, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
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