Polishing composition

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United States of America Patent

PATENT NO 6037260
SERIAL NO

09076116

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Abstract

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The present invention provides a polishing composition which comprises 100 weight part of water; 0.5 to 20 weight part of boehmite, a hydroxide of aluminum, pseudoboehmite or mixtures thereof; 1 to 50 weight part of aluminum oxide (Al.sub.2 O.sub.3); and 1 to 20 weight part of an acidic solution. The polishing composition of the present invention is a thixotropic fluid and displays satisfactory suspension properties. Therefore, it is very suitable for use as a polishing slurry.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEHSINCHU
CHINESE PETROLEUM CORPORATIONNO 3 SUNGREN RD SHINYI CHIU TAIPEI R O C
CHANG CHUN PETROCHEMICAL CO LTD104 TAIPEI CITY
CHINA STEEL CORPORATIONNO 1 CHUNG KANG ROAD HSIAO KANG KAOHSIUNG 81233
ETERNAL CHEMICAL CO LTD578 CHIEN KUNG RD KAOHSIUNG R O C
CHINA PETROCHEMICAL DEVELOPMENT CORPORATIONTAIPEI
A-GREEN CO LTDKAOHSIUNG HSIEN NO 4 LEE-MING STREET TA-FA INDUSTRIAL DISTRICT ROC
WAH HONG INDUSTRIAL CORPORATION11 F-6 NO 235 CHUNG CHENG 4TH ROAD KAOSHING R O C
UNION PETROCHEMICAL CORPORATIONMING-SHEN EAST ROAD SEC 3 8TH FL NO 69 TAIPEI ROC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Li-Mei Hsinchu, TW 16 59
Chen, Ying-Tsung Chiayi, TW 64 556
Hsieh, Chiu-Chih Taipei, TW 1 3
Tsai, Ming-Shyong Tainan Hsien, TW 3 30
Yeh, Yue-Chin Taipei, TW 1 3

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