Pressure sensor having piezoelectric layer formed by hydrothermal synthesis, and method of producing the same
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United States of America Patent
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Mar 14, 2000
Grant Date -
N/A
app pub date -
Mar 9, 1998
filing date -
Mar 12, 1997
priority date (Note) -
Expired
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Abstract
A pressure sensor comprising a flexible substrate, and a piezoelectric element for detecting a pressure,. The piezoelectric element includes a piezoelectric layer and an electrode layer which are formed on at least one of the opposite sides of the flexible substrate such that the piezoelectric layer is disposed between the flexible substrate and the electrode layer. The pressure sensor is characterized by the formation of the piezoelectric layer by hydrothermal synthesis or hydrothermal crystallization method.
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