Grid-actuated charge controlled mirror and method of addressing the same
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United States of America Patent
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Mar 14, 2000
Grant Date -
N/A
app pub date -
Oct 15, 1998
filing date -
Oct 15, 1998
priority date (Note) -
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Abstract
A micromirror light valve target configuration that overcomes the problems of limited deflection range, electrostatic and resolution by forming the secondary electron collector grid of a fine conductive mesh and placing it in close proximity to the micromirror array. The source, preferably a fixed beam array, addresses the micromirror array such that it exhibits a secondary emission coefficient less than one to write a negative charge pattern onto the mirrors so that they are attracted to the collector grid. If the anode is also in close proximity to the array, the mirrors can be addressed so that they deflect up toward the grid and down toward the anode thereby increasing the deflection range.
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