Laser irradiation apparatus
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United States of America Patent
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Mar 14, 2000
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N/A
app pub date -
Feb 28, 1997
filing date -
Feb 28, 1996
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Abstract
There are disposed two homogenizers for controlling an irradiation energy density in the longitudinal direction of a laser light transformed into a linear one which is inputtted into the surface to be irradiated. Also, there is disposed one homogenizer for controlling an irradiation energy density in a width direction of the linear laser light. According to this, the uniformity of laser annealing can be improved by the minimum number of homogenizers.
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