Process and apparatus for removing carbonyls and moisture from a gas

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United States of America Patent

PATENT NO 6042796
SERIAL NO

09195365

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Abstract

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A process and composition for removing metal carbonyls and moisture from a gas wherein the gas is contacted with a metal oxide, an organometallic oxide or mixtures thereof having a reduction potential greater than about 0.175 volts and a composition capable of removing moisture from the gas.

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Patent Owner(s)

  • ENTEGRIS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Snow, James T Nashua, NH 8 112

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