Elastic boundary wave device and method of its manufacture
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United States of America Patent
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Apr 4, 2000
Grant Date -
N/A
app pub date -
Jan 8, 1999
filing date -
May 8, 1997
priority date (Note) -
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Abstract
A boundary wave device and a fabrication method thereof that allow the conversion efficiency of a boundary wave excited by electrodes to be improved and prevents the device from being affected by parasitical resistance between the electrodes are provided. interdigital transducers 3 are formed on a main surface of a piezoelectric first substrate 2. A dielectric film 5 is formed on a main surface of the first substrate 2 so that the dielectric film 5 coats the interdigital transducers 3 and has a smooth surface 4. A Si second substrate 6 is layered on the dielectric film 5.
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