Laser processing method, an ink jet recording head, and a system for manufacturing ink jet recording heads
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United States of America Patent
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Apr 11, 2000
Grant Date -
N/A
app pub date -
Oct 9, 1997
filing date -
Oct 16, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A laser processing method comprises at least one of a laser light source, a beam shaping optical system for shaping laser beams, a mask having specific patterns corresponding to the processing configuration of a work, an illumination optical system for illuminating the mask, and a projection optical system for focusing the pattern images of the mask on the processing surface of the work by a specific magnification. This mask is provided with an extinct portion smaller than the quotient of the resolution and specific magnification of the projection optical system. With the method thus arranged, a work can be processed to provide complicated three-dimensional grooves having irregularities in the direction of laser irradiation by one-time processing. Also, the extinct portions make it possible to easily and finely adjust the extinction so that the precision of work processing is enhanced.
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