Failure analyzer with distributed data processing network and method used therein
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United States of America Patent
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Apr 11, 2000
Grant Date -
N/A
app pub date -
Dec 8, 1997
filing date -
Dec 9, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A failure analyzer has an electric characteristic inspection system for producing pieces of electric test data information for integrated circuit devices fabricated on a semiconductor wafer, a visual inspection system for producing pieces of appearance test data information for the semiconductor wafer and a data analyzing system for producing a failure analysis report from the pieces of electric test data information and the pieces of appearance test data information, and the data analyzing system is implemented by using a client-server network technology so as to increase a data processing capability depending upon the amount of data to be analyzed.
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