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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SIEMENS AKTIENGESELLSCHAFT	80333 MÜNCHEN

International Classification(s)

• G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Geyer, Stefan	Dresden, DE	14	82
Gothel, Ralf	Schullwitz, DE	1	1
Horn, Michael	Dresden, DE	158	2303
Kurth, Kathrin	Dresden, DE	1	1

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 6050125

Calibrating wafer and method for the production of a calibrating wafer

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