Making discrete power connections to a space transformer of a probe card assembly
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 18, 2000
Issued Date -
N/A
app pub date -
Aug 28, 1997
filing date -
Aug 28, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
By segregating at least a substantial portion of the power connections to the space transformer component (506, 700, 800) from the signal connections thereto, constraints on the interposer component (504) may be relaxed. This is particularly advantageous in the context of probing one or more high power semiconductor components. The technique of the present invention provides for a plurality of signals (including power and ground) to be inserted into an electronic component such as a space transformer both from a one main surface thereof and an edge (periphery) thereof to an opposite main surface thereof. The space transformer includes pads (522, 706, 810) for engaging, by means of spring elements (524), component (508) to be tested and includes exposed edge pads (750, 804, 854) for engagement by a flexible cable (752) for transmission of power and ground signals to the space transformer. The system also includes an interposer (504) having resilient contacts (514, 516) for electrically interconnecting a probe card (502) to the space transformer (506).
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