Illumination optical apparatus with optical integrator
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United States of America Patent
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Apr 18, 2000
Grant Date -
N/A
app pub date -
Jan 9, 1998
filing date -
Jan 9, 1997
priority date (Note) -
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Abstract
An illumination optical apparatus includes a light source emitting an illumination light beam, the illumination light beam being directed along a predetermined optical path, a variable optical filter disposed on the predetermined optical path of the illumination light beam for controlling the intensity of the illumination light beam, a transmissivity of the variable optical filter with respect to the illumination light beam being continuously variable, and an optical integrator receiving the illumination light beam that has passed through the variable optical filter to form a plurality of images of the light source.
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