US Patent No: 6,055,090

Number of patents in Portfolio can not be more than 2000

Interferometric modulation

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Abstract

An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miles, Mark W San Francisco, CA 191 10118

Cited Art

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Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (337)
6,674,562 Interferometric modulation of radiation 593 1998
7,123,216 Photonic MEMS and structures 480 1999
7,138,984 Directly laminated touch sensitive screen 89 2001
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 455 2001
6,650,455 Photonic mems and structures 453 2001
6,710,908 Controlling micro-electro-mechanical cavities 306 2002
7,042,643 Interferometric modulation of radiation 155 2002
7,126,738 Visible spectrum modulator arrays 116 2002
7,110,158 Photonic MEMS and structures 157 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 20 2002
7,297,471 Method for manufacturing an array of interferometric modulators 17 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
7,012,726 MEMS devices with unreleased thin film components 65 2003
7,198,973 Method for fabricating an interference display unit 89 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 128 2003
7,692,844 Interferometric modulation of radiation 10 2004
7,532,194 Driver voltage adjuster 3 2004
7,119,945 Altering temporal response of microelectromechanical elements 119 2004
7,706,050 Integrated modulator illumination 27 2004
7,307,776 Optical interference display panel 14 2004
7,193,768 Interference display cell 22 2004
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 25 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
7,060,895 Modifying the electro-mechanical behavior of devices 38 2004
7,280,265 Interferometric modulation of radiation 40 2004
7,164,520 Packaging for an interferometric modulator 30 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 44 2004
7,855,824 Method and system for color optimization in a display 15 2005
7,893,919 Display region architectures 2 2005
7,813,026 System and method of reducing color shift in a display 10 2005
7,630,123 Method and device for compensating for color shift as a function of angle of view 23 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 10 2005
7,424,198 Method and device for packaging a substrate 2 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 22 2005
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,349,141 Method and post structures for interferometric modulation 19 2005
7,142,346 System and method for addressing a MEMS display 26 2005
7,515,147 Staggered column drive circuit systems and methods 9 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 35 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,460,246 Method and system for sensing light using interferometric elements 8 2005
7,560,299 Systems and methods of actuating MEMS display elements 7 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 2 2005
7,928,928 Apparatus and method for reducing perceived color shift 4 2005
7,259,449 Method and system for sealing a substrate 11 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 3 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 5 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 12 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 7 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 7 2005
7,299,681 Method and system for detecting leak in electronic devices 1 2005
7,920,135 Method and system for driving a bi-stable display 2 2005
7,679,627 Controller and driver features for bi-stable display 1 2005
7,586,484 Controller and driver features for bi-stable display 11 2005
7,535,466 System with server based control of client device display features 5 2005
7,532,195 Method and system for reducing power consumption in a display 2 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,289,256 Electrical characterization of interferometric modulators 10 2005
7,602,375 Method and system for writing data to MEMS display elements 0 2005
7,916,103 System and method for display device with end-of-life phenomena 1 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,573,547 System and method for protecting micro-structure of display array using spacers in gap within display device 6 2005
7,551,246 System and method for display device with integrated desiccant 5 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 1 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,889,163 Drive method for MEMS devices 6 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 3 2005
7,403,321 Optical microelectromechanical device 0 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 26 2005
7,547,565 Method of manufacturing optical interference color display 12 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
7,446,926 System and method of providing a regenerating protective coating in a MEMS device 19 2005
7,164,524 Optical microelectromechanical device and fabrication method thereof 0 2005
7,808,703 System and method for implementation of interferometric modulator displays 2 2005
7,349,136 Method and device for a display having transparent components integrated therein 7 2005
RE42119 Microelectrochemical systems device and method for fabricating same 4 2005
8,008,736 Analog interferometric modulator device 0 2005
7,710,629 System and method for display device with reinforcing substance 3 2005
8,124,434 Method and system for packaging a display 0 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,471,444 Interferometric modulation of radiation 12 2005
7,388,706 Photonic MEMS and structures 10 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 18 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
8,004,504 Reduced capacitance display element 3 2005
7,561,323 Optical films for directing light towards active areas of displays 28 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 7 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 12 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 7 2005
8,031,133 Method and device for manipulating color in a display 2 2005
7,304,784 Reflective display device having viewable display on both sides 32 2005
7,750,886 Methods and devices for lighting displays 39 2005
7,525,730 Method and device for generating white in an interferometric modulator display 15 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 78 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 0 2005
7,463,421 Method and device for modulating light 15 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 1 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,492,502 Method of fabricating a free-standing microstructure 11 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 23 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 14 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,136,213 Interferometric modulators having charge persistence 14 2005
8,102,407 Method and device for manipulating color in a display 8 2005
7,911,428 Method and device for manipulating color in a display 13 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 17 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,564,612 Photonic MEMS and structures 53 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 142 2005
7,369,294 Ornamental display device 38 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 19 2005
7,684,104 MEMS using filler material and method 7 2005
7,898,521 Device and method for wavelength filtering 16 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,653,371 Selectable capacitance circuit 10 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 3 2005
7,675,669 Method and system for driving interferometric modulators 2 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 10 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
8,310,441 Method and system for writing data to MEMS display elements 0 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
7,486,429 Method and device for multistate interferometric light modulation 8 2005
7,236,284 Photonic MEMS and structures 82 2005
7,630,114 Diffusion barrier layer for MEMS devices 1 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 0 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 1 2005
7,355,779 Method and system for driving MEMS display elements 1 2006
7,916,980 Interconnect structure for MEMS device 0 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 4 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,603,001 Method and apparatus for providing back-lighting in an interferometric modulator display device 36 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 6 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 40 2006
7,483,197 Photonic MEMS and structures 16 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 11 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,643,203 Interferometric optical display system with broadband characteristics 17 2006
7,948,457 Systems and methods of actuating MEMS display elements 0 2006
7,903,047 Mode indicator for interferometric modulator displays 2 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 0 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 4 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 42 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 1 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
8,049,713 Power consumption optimized display update 1 2006
7,920,136 System and method of driving a MEMS display device 0 2006
7,706,044 Optical interference display cell and method of making the same 8 2006
7,880,954 Integrated modulator illumination 14 2006
7,369,292 Electrode and interconnect materials for MEMS devices 13 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 15 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,848,001 Method and system for interferometric modulation in projection or peripheral devices 4 2006
7,907,319 Method and device for modulating light with optical compensation 19 2006
7,161,094 Modifying the electro-mechanical behavior of devices 17 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 7 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 60 2006
7,187,489 Photonic MEMS and structures 73 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 4 2006
7,766,498 Linear solid state illuminator 13 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 4 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
7,777,715 Passive circuits for de-multiplexing display inputs 2 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 10 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 3 2006
7,534,640 Support structure for MEMS device and methods therefor 13 2006
7,830,586 Transparent thin films 10 2006
7,554,711 MEMS devices with stiction bumps 30 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 3 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 24 2006
7,928,940 Drive method for MEMS devices 0 2006
7,845,841 Angle sweeping holographic illuminator 10 2006
8,107,155 System and method for reducing visual artifacts in displays 0 2006
7,855,827 Internal optical isolation structure for integrated front or back lighting 11 2006
7,684,107 Internal optical isolation structure for integrated front or back lighting 0 2006
7,898,722 Microelectromechanical device with restoring electrode 26 2006
7,629,197 Spatial light modulator 27 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 2 2006
7,385,748 Visible spectrum modulator arrays 26 2006
7,388,697 System and method for addressing a MEMS display 5 2006
7,242,512 System and method for addressing a MEMS display 6 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,864,395 Light guide including optical scattering elements and a method of manufacture 14 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 40 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 6 2006
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 0 2007
7,884,989 White interferometric modulators and methods for forming the same 2 2007
7,872,792 Method and device for modulating light with multiple electrodes 4 2007
7,777,954 Systems and methods of providing a light guiding layer 16 2007
7,619,822 Systems and methods of providing a light guiding layer 0 2007
7,518,775 Method and system for packaging a MEMS device 6 2007
7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops 7 2007
7,746,537 MEMS devices and processes for packaging such devices 9 2007
7,715,080 Packaging a MEMS device using a frame 1 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,733,439 Dual film light guide for illuminating displays 21 2007
7,715,085 Electromechanical system having a dielectric movable membrane and a mirror 4 2007
7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror 5 2007
7,643,199 High aperture-ratio top-reflective AM-iMod displays 6 2007
7,826,127 MEMS device having a recessed cavity and methods therefor 0 2007
7,782,517 Infrared and dual mode displays 4 2007
7,944,599 Electromechanical device with optical function separated from mechanical and electrical function 1 2007
7,630,121 Electromechanical device with optical function separated from mechanical and electrical function 9 2007
7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function 14 2007
8,115,987 Modulating the intensity of light from an interferometric reflector 0 2007
7,642,127 Method and system for sealing a substrate 2 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 14 2007
7,869,055 Process control monitors for interferometric modulators 0 2007
7,852,545 Method and device for modulating light 8 2007
7,808,694 Method and device for modulating light 8 2007
7,629,678 Method and system for sealing a substrate 1 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 1 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 19 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 2 2007
7,982,700 Conductive bus structure for interferometric modulator array 0 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 19 2007
7,999,993 Reflective display device having viewable display on both sides 0 2007
7,773,286 Periodic dimple array 2 2007
8,068,710 Decoupled holographic film and diffuser 0 2007
7,949,213 Light illumination of displays with front light guide and coupling elements 3 2007
7,715,079 MEMS devices requiring no mechanical support 3 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 1 2007
7,847,999 Interferometric modulator display devices 1 2008
8,111,445 Spatial light modulator with integrated optical compensation structure 1 2008
7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device 8 2008
7,515,327 Method and device for corner interferometric modulation 10 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 4 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 0 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 1 2008
8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 0 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 0 2008
7,719,747 Method and post structures for interferometric modulation 13 2008
7,612,933 Microelectromechanical device with spacing layer 16 2008
7,898,723 Microelectromechanical systems display element with photovoltaic structure 5 2008
7,969,638 Device having thin black mask and method of fabricating the same 0 2008
7,948,672 System and methods for tiling display panels 0 2008
7,839,557 Method and device for multistate interferometric light modulation 5 2008
8,023,191 Printable static interferometric images 0 2008
7,943,202 Apparatus and methods for providing a static interferometric display device 0 2008
8,023,167 Backlight displays 0 2008
7,768,690 Backlight displays 1 2008
7,746,539 Method for packing a display device and the device obtained thereof 1 2008
7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices 6 2008
8,045,835 Method and device for packaging a substrate 1 2008
7,848,003 Semi-transparent/transflective lighted interferometric devices 9 2008
8,169,686 Display with integrated photovoltaics 0 2008
8,130,440 Display with integrated photovoltaic device 0 2008
8,054,527 Adjustably transmissive MEMS-based devices 0 2008
7,704,772 Method of manufacture for microelectromechanical devices 11 2008
7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control 0 2008
7,839,559 Controller and driver features for bi-stable display 0 2008
8,193,441 Photovoltaics with interferometric ribbon masks 0 2008
8,111,446 Optical films for controlling angular characteristics of displays 1 2008
7,978,396 Optical interference display panel 1 2008
7,787,173 System and method for multi-level brightness in interferometric modulation 6 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 0 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 11 2009
7,944,604 Interferometric modulator in transmission mode 1 2009
8,040,589 Devices and methods for enhancing brightness of displays using angle conversion layers 0 2009
8,172,417 Shaped frontlight reflector for use with display 0 2009
8,270,056 Display device with openings between sub-pixels and method of making same 0 2009
8,061,882 Illumination device with built-in light coupler 0 2009
8,368,981 Display device with diffractive optics 0 2009
8,115,983 Method and system for packaging a MEMS device 0 2009
8,049,951 Light with bi-directional propagation 0 2009
7,889,415 Device having a conductive light absorbing mask and method for fabricating same 4 2009
8,098,431 Method and device for generating white in an interferometric modulator display 0 2009
8,102,590 Method of manufacturing MEMS devices providing air gap control 0 2009
8,081,370 Support structures for electromechanical systems and methods of fabricating the same 0 2009
7,952,787 Method of manufacturing MEMS devices providing air gap control 0 2009
8,004,736 Optical interference display panel and manufacturing method thereof 0 2009
8,085,461 Systems and methods of actuating MEMS display elements 0 2009
7,906,353 Method of fabricating interferometric devices using lift-off processing techniques 0 2009
7,889,417 Electromechanical system having a dielectric movable membrane 2 2009
8,405,899 Photonic MEMS and structures 0 2009
8,358,266 Light turning device with prismatic light turning features 0 2009
8,270,062 Display device with at least one movable stop element 0 2009
8,068,269 Microelectromechanical device with spacing layer 0 2009
8,379,392 Light-based sealing and device packaging 0 2009
8,081,372 Method and system for driving interferometric modulators 0 2009
7,935,555 Method and system for sealing a substrate 0 2009
7,920,319 Electromechanical device with optical function separated from mechanical and electrical function 0 2009
7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator 1 2009
7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator 0 2009
7,995,265 Interferometric modulators having charge persistence 0 2009
8,422,108 Method and device for modulating light with optical compensation 0 2009
8,098,416 Analog interferometric modulator device with electrostatic actuation and release 0 2010
7,933,476 Method and device for providing electronic circuitry on a backplate 3 2010
7,852,544 Separable modulator 31 2010
7,929,197 System and method for a MEMS device 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,077,380 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 1 2010
8,344,997 Method and system for writing data to electromechanical display elements 0 2010
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,264,763 Controller and driver features for bi-stable display 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,416,154 Apparatus and method for reducing perceived color shift 0 2011
8,289,613 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,174,752 Interferometric modulator in transmission mode 0 2011
8,090,229 Method and device for providing electronic circuitry on a backplate 1 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,310,758 Printable static interferometric images 0 2011
8,411,026 Methods and devices for lighting displays 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,218,919 Method and device for providing electronic circuitry on a backplate 0 2012
 
SILICON LIGHT MACHINES CORPORATION (40)
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 24 2000
6,466,354 Method and apparatus for interferometric modulation of light 253 2000
7,177,081 High contrast grating light valve type device 5 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 24 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 59 2001
6,829,092 Blazed grating light valve 11 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 60 2002
6,991,953 Microelectronic mechanical system and methods 9 2002
6,767,751 Integrated driver process flow 3 2002
6,728,023 Optical device arrays with optimized image resolution 17 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 5 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 18 2002
6,829,258 Rapidly tunable external cavity laser 27 2002
6,908,201 Micro-support structures 2 2002
6,813,059 Reduced formation of asperities in contact micro-structures 65 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 1 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 2 2002
6,712,480 Controlled curvature of stressed micro-structures 6 2002
7,049,164 Microelectronic mechanical system and methods 49 2002
6,928,207 Apparatus for selectively blocking WDM channels 1 2002
7,057,819 High contrast tilting ribbon blazed grating 1 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 0 2002
6,934,070 Chirped optical MEM device 3 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 4 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 2 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 5 2003
7,391,973 Two-stage gain equalizer 0 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 52 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 2 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 1 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
PIXTRONIX, INC. (22)
7,417,782 Methods and apparatus for spatial light modulation 15 2005
7,304,785 Display methods and apparatus 21 2005
7,304,786 Methods and apparatus for bi-stable actuation of displays 23 2005
7,271,945 Methods and apparatus for actuating displays 20 2005
8,159,428 Display methods and apparatus 0 2006
7,755,582 Display methods and apparatus 1 2006
7,742,016 Display methods and apparatus 1 2006
7,616,368 Light concentrating reflective display methods and apparatus 1 2006
7,405,852 Display apparatus and methods for manufacture thereof 25 2006
7,876,489 Display apparatus with optical cavities 11 2006
7,619,806 Methods and apparatus for spatial light modulation 4 2006
8,310,442 Circuits for controlling display apparatus 0 2006
7,502,159 Methods and apparatus for actuating displays 10 2007
7,365,897 Methods and apparatus for spatial light modulation 15 2007
7,675,665 Methods and apparatus for actuating displays 4 2007
7,839,356 Display methods and apparatus 3 2007
7,636,189 Display methods and apparatus 2 2007
7,551,344 Methods for manufacturing displays 3 2007
7,927,654 Methods and apparatus for spatial light modulation 1 2007
7,852,546 Spacers for maintaining display apparatus alignment 4 2007
7,746,529 MEMS display apparatus 4 2007
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
7,436,389 Method and system for controlling the output of a diffractive light device 0 2004
7,733,553 Light modulator with tunable optical state 2 2005
7,218,438 Optical electronic device with partial reflector layer 11 2005
 
SHARP KABUSHIKI KAISHA (3)
7,113,339 Interferometric modulator and display unit 75 2004
7,999,995 Full color range interferometric modulation 0 2009
7,957,049 Highly reflective MEMS device 0 2010
 
OLYMPUS CORPORATION (2)
7,405,884 Optical apparatus 4 2001
7,019,919 Optical system and imaging device 4 2004
 
QUALCOMM INCORPORATED (2)
7,532,385 Optical interference display panel and manufacturing method thereof 10 2004
7,470,373 Optical interference display panel 7 2006
 
SONY CORPORATION (2)
6,940,631 Optical multilayer structure, optical switching device, and image display 80 2001
7,012,734 Optical multilayer structure, optical switching device, and image display 0 2005
 
CANON KABUSHIKI KAISHA (1)
6,608,621 Image displaying method and apparatus 3 2001
 
EASTMAN CHEMICAL COMPANY (1)
7,602,108 Micro-coextruded film modified with piezoelectric layers 0 2006
 
IDC, LLC (1)
6,589,625 Hermetic seal and method to create the same 255 2001
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 27 2004
 
NEOPHOTONICS CORPORATION (1)
6,268,952 Micromechanical light steering optical switch 89 1999
 
PITRONIX, INC. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 0 2011
 
QUALCOMM MEMS TECHNOLOGIES CO., LTD. (1)
7,172,915 Optical-interference type display panel and method for making the same 69 2004
 
SEIKO EPSON CORPORATION (1)
7,034,981 Optical modulator, display device and manufacturing method for same 81 2004
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6,741,384 Control of MEMS and light modulator arrays 208 2003
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 5 2005
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (2)
7,027,208 Optical multilayer structure, optical switching device, and image display 0 2005
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2012