Optical system for measuring and inspecting partially transparent substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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May 2, 2000
Issued Date -
N/A
app pub date -
Sep 4, 1998
filing date -
May 3, 1996
priority date (Note) -
Expired
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Abstract
Techniques and systems for obtaining the thickness map of a partially transparent substrate in a nondestructive optical fashion. The thickness is determined by comparing the amount of absorption by the substrate to a calibrated amount obtained from a substrate standard with a known thickness that is formed of the same material. Digital signal processing operations are performed to reduce noise and to improve resolution of the thickness map.
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