Apparatus and method of uniformly ablating a layer from the surface of a substrate
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United States of America Patent
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May 9, 2000
Issued Date -
N/A
app pub date -
Aug 11, 1997
filing date -
Jan 25, 1995
priority date (Note) -
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Abstract
The apparatus and the method of ablating matter from a substrate using a laser, an optical system, and a screen arranged within the beam path of the laser. A laser spot is formed which exhibits light and dark sections. By adjusting the screen before each laser pulse, the entire surface area of the laser spot is subjected to the same number of laser pulses.
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