Si/SiGe superlattice structures for use in thermoelectric devices
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United States of America Patent
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May 9, 2000
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N/A
app pub date -
Mar 16, 1998
filing date -
Mar 17, 1997
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Abstract
A superlattice structure for use in thermoelectric power generation systems includes m layers of a first one of Silicon and Antimony doped Silicon-Germanium alternating with n layers of Silicon-Germanium which provides a superlattice structure having a thermoelectric figure of merit which increases with increasing temperature above the maximum thermoelectric figure of merit achievable for bulk SiGe alloys.
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