Substrate processing apparatus having regulated power consumption and method therefor
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United States of America Patent
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May 9, 2000
Grant Date -
N/A
app pub date -
Mar 13, 1998
filing date -
Mar 17, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.
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