Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 9, 2000
Grant Date -
N/A
app pub date -
Dec 31, 1997
filing date -
Dec 31, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A conductive slit screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by depositing alternating polarity corona charge until the potential of the wafer equals the potential of the screen.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully