US Patent No: 6,060,818

Number of patents in Portfolio can not be more than 2000

SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters

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Abstract

An acoustical resonator and a method for making the same. A resonator according to the present invention includes a layer of piezoelectric material sandwiched between first and second electrodes. The first electrode includes a conducting sheet having a RMS variation in height of less than 2 .mu.m. The resonator bridges a cavity in a substrate on which the resonator is constructed. The resonator is constructed by creating a cavity in the substrate and filling the same with a sacrificial material that can be rapidly removed from the cavity after the deposition of the various layers making up the resonator. The surface of the filled cavity is polished to provide a RMS variation in height of less than 0.5 .mu.m. The first electrode is deposited on the polished surface to a thickness that assures that the RMS variation in height of the metallic layer is less than 2 .mu.m. The piezoelectric layer is deposited on the first electrode and the second electrode is then deposited on the piezoelectric layer. The sacrificial material is then removed from the cavity by opening vias into the cavity and removing the material through the vias. The preferred sacrificial material is phophor-silica-glass.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD.SINGAPORE353

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bradbury, Donald R Palo Alto, CA 7 303
Desai, Yogesh San Jose, CA 1 141
Ruby, Richard C Menlo Park, CA 114 2795

Cited Art

Patent Info (Count) # Cites Year
 
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. (2)
5,587,620 Tunable thin film acoustic resonators and method for making the same 157 1993
5,873,153 Method of making tunable thin film acoustic resonators 126 1996

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. (64)
6,420,820 Acoustic wave resonator and method of operating the same to maintain resonance when subjected to temperature variations 58 2000
6,377,137 Acoustic resonator filter with reduced electromagnetic influence due to die substrate thickness 71 2000
6,424,237 Bulk acoustic resonator perimeter reflection system 67 2000
6,534,900 Piezoresonator 58 2001
6,874,211 Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 50 2001
6,787,048 Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 49 2001
6,617,249 Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method 60 2001
6,566,979 Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method 62 2001
6,483,229 Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method 64 2001
6,469,597 Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method 67 2001
6,668,618 Systems and methods of monitoring thin film deposition 53 2001
6,710,681 Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same 60 2001
6,874,212 Method of making an acoustic wave resonator 46 2001
6,710,508 Method for adjusting and stabilizing the frequency of an acoustic resonator 52 2001
6,894,360 Electrostatic discharge protection of thin-film resonators 4 2002
6,651,488 Systems and methods of monitoring thin film deposition 58 2002
7,275,292 Method for fabricating an acoustical resonator on a substrate 25 2003
7,094,678 Electrostatic discharge protection of thin-film resonators 2 2004
7,038,559 Vertically separated acoustic filters and resonators 4 2004
7,161,448 Acoustic resonator performance enhancements using recessed region 25 2004
7,615,833 Film bulk acoustic resonator package and method of fabricating same 2 2004
7,400,217 Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith 5 2004
7,391,285 Film acoustically-coupled transformer 3 2004
7,388,455 Film acoustically-coupled transformer with increased common mode rejection 22 2004
7,362,198 Pass bandwidth control in decoupled stacked bulk acoustic resonator devices 2 2004
7,358,831 Film bulk acoustic resonator (FBAR) devices with simplified packaging 20 2004
7,332,985 Cavity-less film bulk acoustic resonator (FBAR) devices 20 2004
7,408,428 Temperature-compensated film bulk acoustic resonator (FBAR) devices 28 2004
7,098,758 Acoustically coupled thin-film resonators having an electrode with a tapered edge 54 2004
7,202,560 Wafer bonding of micro-electro mechanical systems to active circuitry 12 2004
7,791,434 Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric 5 2004
7,427,819 Film-bulk acoustic wave resonator with motion plate and method 4 2005
7,248,131 Monolithic vertical integration of an acoustic resonator and electronic circuitry 5 2005
7,369,013 Acoustic resonator performance enhancement using filled recessed region 25 2005
7,436,269 Acoustically coupled resonators and method of making the same 7 2005
7,358,651 Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators 2 2005
7,388,454 Acoustic resonator performance enhancement using alternating frame structure 27 2005
7,563,475 Vertically separated acoustic filters and resonators 0 2005
7,868,522 Adjusted frequency temperature coefficient resonator 4 2005
7,391,286 Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters 9 2005
7,737,807 Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators 2 2005
7,675,390 Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator 2 2005
7,425,787 Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator 33 2005
7,423,503 Acoustic galvanic isolator incorporating film acoustically-coupled transformer 14 2005
7,424,772 Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth 4 2006
7,612,636 Impedance transforming bulk acoustic wave baluns 6 2006
7,746,677 AC-DC converter circuit and power supply 2 2006
7,312,675 Vertically separated acoustic filters and resonators 1 2006
7,629,865 Piezoelectric resonator structures and electrical filters 11 2006
7,508,286 HBAR oscillator and method of manufacture 6 2006
8,143,082 Wafer bonding of micro-electro mechanical systems to active circuitry 1 2007
7,802,349 Manufacturing process for thin film bulk acoustic resonator (FBAR) filters 1 2007
7,791,435 Single stack coupled resonators having differential output 1 2007
8,230,562 Method of fabricating an acoustic resonator comprising a filled recessed region 0 2007
7,855,618 Bulk acoustic resonator electrical impedance transformers 2 2008
7,732,977 Transceiver circuit for film bulk acoustic resonator (FBAR) transducers 1 2008
7,714,684 Acoustic resonator performance enhancement using alternating frame structure 2 2008
8,248,185 Acoustic resonator structure comprising a bridge 2 2009
8,193,877 Duplexer with negative phase shifting circuit 0 2009
8,238,129 AC-DC converter circuit and power supply 0 2010
8,188,810 Acoustic resonator performance enhancement using selective metal etch 1 2010
8,384,269 Electrostatic bonding of a die substrate to a package substrate 0 2010
8,330,325 Bulk acoustic resonator comprising non-piezoelectric layer 0 2011
8,350,445 Bulk acoustic resonator comprising non-piezoelectric layer and bridge 0 2011
 
LUCENT TECHNOLOGIES INC. (11)
6,524,971 Method of deposition of films 4 1999
6,323,744 Grounding of TFR ladder filters 15 2000
6,306,313 Selective etching of thin films 6 2000
6,329,305 Method for producing devices having piezoelectric films 9 2000
6,603,241 Acoustic mirror materials for acoustic devices 10 2000
6,355,498 Thin film resonators fabricated on membranes created by front side releasing 48 2000
6,674,291 Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom 2 2000
6,486,751 Increased bandwidth thin film resonator having a columnar structure 63 2000
6,675,450 Method of manufacturing and mounting electronic devices to limit the effects of parasitics 4 2000
6,587,212 Method and apparatus for studying vibrational modes of an electro-acoustic device 7 2000
6,743,731 Method for making a radio frequency component and component produced thereby 2 2000
 
AVAGO TECHNOLOGIES GENERAL IP PTE. LTD. (8)
7,525,398 Acoustically communicating data signals across an electrical isolation barrier 32 2005
7,463,499 AC-DC power converter 3 2005
7,561,009 Film bulk acoustic resonator (FBAR) devices with temperature compensation 7 2005
7,841,055 Method of manufacturing vertically separated acoustic filters and resonators 0 2006
7,479,685 Electronic device on substrate with cavity and mitigated parasitic leakage path 4 2006
7,367,095 Method of making an acoustically coupled transformer 21 2006
7,852,644 AC-DC power converter 1 2008
8,080,854 Electronic device on substrate with cavity and mitigated parasitic leakage path 1 2008
 
KABUSHIKI KAISHA TOSHIBA (7)
6,747,529 Piezoelectric thin film resonator and frequency variable resonator using the resonator 11 2002
7,301,260 Bulk acoustic wave device and method of manufacturing the same 4 2003
7,321,183 Film bulk acoustic resonator and method for manufacturing the same 1 2004
7,323,805 Piezoelectric thin film device and method for manufacturing the same 10 2005
7,525,399 Thin-film piezoelectric resonator, filter and voltage-controlled oscillator 1 2006
7,770,274 Piezoelectric thin film device and method for manufacturing the same 0 2007
7,420,320 Piezoelectric thin film device and method for manufacturing the same 10 2007
 
AGERE SYSTEMS INC. (6)
7,296,329 Method of isolation for acoustic resonator device 4 2000
7,435,613 Methods of fabricating a membrane with improved mechanical integrity 2 2001
7,328,497 Incremental tuning process for electrical resonators based on mechanical motion 2 2005
7,631,412 Incremental tuning process for electrical resonators based on mechanical motion 2 2007
7,895,720 Methods of fabricating a membrane with improved mechanical integrity 1 2008
8,225,472 Methods of fabricating a membrane with improved mechanical integrity 0 2011
 
NOKIA MOBILE PHONES LTD. (6)
6,515,558 Thin-film bulk acoustic resonator with enhanced power handling capacity 46 2000
6,496,085 Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror 31 2001
6,518,860 BAW filters having different center frequencies on a single substrate and a method for providing same 52 2001
6,407,649 Monolithic FBAR duplexer and method of making the same 81 2001
6,509,813 Bulk acoustic wave resonator with a conductive mirror 21 2001
6,521,100 Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method 2 2001
 
TAIYO YUDEN CO., LTD. (5)
6,732,415 Film bulk acoustic resonator and method of making the same 5 2001
6,734,763 Thin-film piezoelectric resonator, band-pass filter and method of making thin-film piezoelectric resonator 12 2002
6,930,437 Film bulk acoustic resonator 2 2004
8,085,115 Piezoelectric thin film resonator, filter, and communication apparatus 1 2009
8,222,970 Resonant device, communication module, communication device, and method for manufacturing resonant device 0 2009
 
INTEL CORPORATION (3)
7,914,740 Biosensor utilizing a resonator having a functionalized surface 1 2005
7,871,569 Biosensor utilizing a resonator having a functionalized surface 1 2005
8,173,436 Biosensor utilizing a resonator having a functionalized surface 0 2010
 
RF MICRO DEVICES, INC. (3)
6,448,793 Adaptive manufacturing of semiconductor circuits 17 2000
7,101,721 Adaptive manufacturing for film bulk acoustic wave resonators 10 2002
8,278,802 Planarized sacrificial layer for MEMS fabrication 1 2009
 
AGERE SYSTEMS GUARDIAN CORP. (2)
6,437,667 Method of tuning thin film resonator filters by removing or adding piezoelectric material 3 2000
6,377,136 Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance 10 2000
 
GEORGIA TECH RESEARCH CORPORATION (2)
7,023,065 Capacitive resonators and methods of fabrication 33 2003
6,909,221 Piezoelectric on semiconductor-on-insulator microelectromechanical resonators 50 2003
 
PANASONIC CORPORATION (2)
7,701,117 Acoustic resonator and filter 0 2006
7,986,198 Frequency-variable acoustic thin film resonator, filter and communication apparatus using the same 1 2007
 
SAE MAGNETICS (H.K.) LTD. (2)
8,302,285 Method of making a sensing unit 0 2010
8,230,577 Method of making a sensing unit 0 2010
 
SAMSUNG ELECTRONICS CO., LTD. (2)
7,281,304 Method for fabricating a film bulk acoustic resonator 25 2004
7,535,322 Monolithic RF filter 0 2005
 
TDK CORPORATION (2)
6,774,746 Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide 49 2002
7,109,637 Thin-film bulk acoustic oscillator and method of manufacturing same 1 2004
 
THE CHARLES STARK DRAPER LABORATORY, INC. (2)
7,005,946 MEMS piezoelectric longitudinal mode resonator 21 2003
7,312,674 Resonator system with a plurality of individual mechanically coupled resonators and method of making same 12 2004
 
EPCOS AG (1)
8,291,559 Process for adapting resonance frequency of a BAW resonator 0 2009
 
EPCOS INC. (1)
6,998,940 Component operating with bulk acoustic waves and a method for producing the component 48 2004
 
HITACHI MEDIA ELECTRONICS CO., LTD. (1)
7,221,242 Bulk acoustic wave resonator and manufacturing method thereof, filter using the same, semiconductor integrated circuit device using the same, and high frequency module using the same 5 2005
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
6,905,970 Method for making a thin film bulk acoustic-wave resonator 2 2002
 
MAXIM INTEGRATED PRODUCTS, INC. (1)
7,768,364 Bulk acoustic resonators with multi-layer electrodes 5 2008
 
PALO ALTO RESEARCH CENTER INCORPORATED (1)
7,528,681 Acoustic devices using an AlGaN piezoelectric region 1 2005
 
QUALTRE, INC. (1)
8,372,677 Three-axis accelerometers and fabrication methods 0 2012
 
SAMSUNG ELECTRO-MECHANICS CO., LTD. (1)
7,626,745 Diffractive thin-film piezoelectric micromirror and method of producing the same 2 2004
 
STMICROELECTRONICS N.V. (1)
6,746,577 Method and apparatus for thickness control and reproducibility of dielectric film deposition 1 1999
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
8,042,255 Rapid fabrication techniques for arbitrary shape piezoelectric transducer sensors 0 2008
 
TOKO, INC. (1)
7,114,252 Large scale simultaneous circuit encapsulating apparatus 1 2004
 
TRIQUINT SEMICONDUCTOR, INC. (1)
7,448,119 Method of producing a surface acoustic wave device 0 2007
 
UBE INDUSTRIES, LTD. (1)
6,842,088 Thin film acoustic resonator and method of producing the same 78 2002
 
ZAMTEC LIMITED (1)
6,625,874 Method of making a thermal bend actuator 1 2001