Dry powder deposition apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
May 16, 2000
Grant Date -
N/A
app pub date -
Jun 10, 1998
filing date -
Jun 10, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
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